Photo-physical Study of Al doped ZnO thin films grown by sol-gel method

Abstract

In the present study ZnO:Al Thin films were prepared by sol-gel method. We have fabricated the aluminium doped ZnO thin films by varying the deposition cycle and annealing temperature. The spin-coating speed of the samples were 3000 rpm for 30 sec and subjected to 300 oC and 500 oC annealing temperatures to obtain uniform films. The obtained films were characterized by using X-ray diffraction to determine the crystalline structure of the prepared films. The surface morphology study was carried out by high resolution field emission scanning electron microscopy (FE-SEM). Optical properties of AZO. The XRD pattern of AZO thin films revealed the hexagonal crystal structure.The surface morphology of AZO thin films was uniform and nanocrystalline particle growth was observed. AZO thin films were highly transparent (>90 %) in the visible region